Introduction

The UMass Nanoimprint Cleanroom was built in 2005 for $1.2M. It was funded initially by several sources including the NSF Center for hierarchical Manufacturing (CHM), a NSF Major Instrumentation Grant, and startup funds from Professor K. R. Carter (PSE). The cleanroom has the following design specifications:

• 400 square feet soft wall clean room
• Two fume hoods
• Certified at Class 1,000
• Temperature 68 ±4° F
• Staff: No Current Manager
• Entire budget paid by user fees
• Building facilities maintained by physical plant
• B442 User and Training Resources

The original faculty founder was K. R. Carter.

Over the course of the last 14 years, at least 15 Faculty Users from 5 departments have relied on the cleanroom, including:

• R. Carter (PSE)
• Crosby (PSE)
• P. Russell (PSE)
• J. Watkins (PSE)
• Desu (ECE)
• Rothstein (MIE)
• Rotello (CHEM)
• Perry (CHE)
• Tuominen (PHY)
• Xia (ECE)
• Kim (MIE)